Volume: Vol-4299 SeMatS 2026 | Year: 2026

Paper: « paper5 | paper6 | paper7 »

Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

• Sameer Sadruddin
• Eleni Poupaki
• Alex Watkins
• Bora Karasulu
• Adriaan J.M. Mackus
• Erwin Kessels
• Sören Auer
• Jennifer D'Souza

66-83 PDF 10.83095/ceurws_04299_006